NDLI: Validated simulation models for factory control

Content Provider	IEEE Xplore Digital Library
Author	Atherton, R.W. Pool, M.A. Mukherjee, S. Hodgman, R.
Copyright Year	1989
Description	Author affiliation: In-Motion Technol., Mountain View, CA, USA (Atherton, R.W.; Pool, M.A.)
Abstract	The authors describe the use of the ACHILLES simulation model in the wafer fabrication facility of Silicon Systems Inc. at Tustin, California. The accuracy of the model results from initialization, calibration, and validation procedures. The validated model was used to reduce by one-half the cycle time of a major process in a multiprocess operating environment. The validation procedure enhances installed CAM (computer-aided manufacturing) systems by improving the accuracy and value of operation information in the CAM database.
Starting Page	118
Ending Page	122
File Size	417599
Page Count	5
File Format	PDF
DOI	10.1109/ISMSS.1989.77259
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1989-05-22
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Production facilities Computer aided manufacturing Semiconductor device modeling CADCAM Calibration Fabrication CMOS technology Databases Silicon Electrical equipment industry
Content Type	Text
Resource Type	Article

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Validated simulation models for factory control