NDLI: Accuracy issues in a high-level model for MEMS varactors

Content Provider	IEEE Xplore Digital Library
Author	Sankaranarayanan, J.G. Behera, Manas Aluru, Narayan, Mayaram, Kartikeya
Copyright Year	2003
Description	Author affiliation: Sch. of Electr. Eng. & Comput. Sci., Oregon State Univ., Corvallis, OR, USA (Sankaranarayanan, J.G.; Manas Behera)
Abstract	We present accuracy issues for an equivalent circuit model and an AHDL model (high-level models) of MEMS varactors. Simulations of different MEMS varactor structures were done using the high-level models and an electrostatic/mechanical solver EMS.9. The limitations of the varactor high-level models are presented in the context of a RF MEMS VCO operating at 1.6 GHz in a TSMC 0.35 m CMOS technology.
Sponsorship	IEEE Circuits and Syst. Soc
Starting Page	144
Ending Page	148
File Size	415396
Page Count	5
File Format	PDF
ISBN	0780381351
DOI	10.1109/BMAS.2003.1249874
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2003-10-08
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Varactors Semiconductor device modeling CMOS technology Equivalent circuits Circuit simulation Electrostatics Context modeling Radiofrequency microelectromechanical systems Voltage-controlled oscillators
Content Type	Text
Resource Type	Article

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Accuracy issues in a high-level model for MEMS varactors