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Content Provider | IEEE Xplore Digital Library |
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Author | Meng Miao Nguyen, C. |
Copyright Year | 1963 |
Abstract | A novel millimeter-wave cavity resonator, completely compatible with commercial CMOS fabrication techniques, has been designed and fabricated in a 0.25-mum CMOS process and tested. The resonator employs a capacitively loaded cavity topology effectively implemented using the CMOS multimetal-layer and via-hole structure. The CMOS capacitively loaded cavity resonator, including two coupling apertures and microstrip feed lines, occupies an area of 2 mmtimes1.4 mmtimes6.28 mum, which is much smaller than the cavity resonator designed without a capacitive load at the same resonant frequency. It resonates at 30 GHz with a corresponding insertion loss of 2 dB and unloaded quality factor of 22.2. The resonant-frequency reduction is approximately 50%, as compared to that without the capacitive load. The design and performance of a new CMOS coupling aperture, which is useful as a coupling mechanism and a vertical interconnect for highly dense millimeter-wave CMOS RF integrated circuits (RFICs) are also presented. The developed low-loss and compact CMOS cavity resonator can be used to realize various millimeter-wave on-chip passive components such as wideband bandpass filters and diplexers and is suitable for direct integration with other CMOS circuits on a single chip. It is attractive for CMOS RFIC design at millimeter-wave frequencies |
Sponsorship | IEEE Microwave Theory and Techniques Society |
Starting Page | 783 |
Ending Page | 787 |
Page Count | 5 |
File Size | 710841 |
File Format | |
ISSN | 00189480 |
Volume Number | 55 |
Issue Number | 4 |
Language | English |
Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Publisher Date | 2007-04-01 |
Publisher Place | U.S.A. |
Access Restriction | Subscribed |
Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
Subject Keyword | Nonhomogeneous media Cavity resonators Radiofrequency integrated circuits Millimeter wave technology CMOS process Apertures Coupling circuits Millimeter wave integrated circuits CMOS technology Fabrication RF resonators Aperture-coupled cavity resonators CMOS RF integrated circuit (RFIC) coupling apertures microwave and millimeter-wave integrated circuit (IC) microwave and millimeter-wave resonators passive components |
Content Type | Text |
Resource Type | Article |
Subject | Condensed Matter Physics Electrical and Electronic Engineering Radiation |
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